Filtering by: Creator Patil, Hrishikesh Remove constraint Creator: Patil, Hrishikesh Department Department of Electrical Engineering Remove constraint Department: Department of Electrical Engineering
Masters ThesisPatil, HrishikeshMEMS (Micro-electro-mechanical systems) gyroscopes are widely used as an inertial measurement unit in different industrial applications. MEMS are the device that combines mechanical and electrical components on a small silicon wafer with components si . . .