Filtering by: Creator Patil, Hrishikesh Remove constraint Creator: Patil, Hrishikesh Resource type Masters Thesis Remove constraint Resource type: Masters Thesis
Masters ThesisPatil, HrishikeshMEMS (Micro-electro-mechanical systems) gyroscopes are widely used as an inertial measurement unit in different industrial applications. MEMS are the device that combines mechanical and electrical components on a small silicon wafer with components si . . .