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Filtering by: Creator Patil, Hrishikesh Remove constraint Creator: Patil, Hrishikesh Resource type Masters Thesis Remove constraint Resource type: Masters Thesis

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    Masters Thesis
    Patil, Hrishikesh
    MEMS (Micro-electro-mechanical systems) gyroscopes are widely used as an inertial measurement unit in different industrial applications. MEMS are the device that combines mechanical and electrical components on a small silicon wafer with components si . . .